Hot-electron flux observation in large-area microwave sustained plasmas
Flux of hot electrons directed away from the waveguiding plasma-dielectric interface was experimentally observed in large-area microwave discharges. The energy of these electrons attains values of some 60 eV, and they are believed to be originating from the resonantly-enhanced electric field region...
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| Veröffentlicht in: | Applied physics letters 2000-03, Vol.76 (10), p.1249-1251 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Flux of hot electrons directed away from the waveguiding plasma-dielectric interface was experimentally observed in large-area microwave discharges. The energy of these electrons attains values of some 60 eV, and they are believed to be originating from the resonantly-enhanced electric field region localized near the dielectric. The phenomenon appears to play a significant role in discharge heating mechanism, which is demonstrated by plasma parameter profiles. |
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| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.125999 |