Reduction of threading dislocations by InGaAs interlayer in GaAs layers grown on Si substrates
High-quality GaAs epilayers with dislocation densities of 1.2×106 cm−2 on (100)Si substrates have been obtained by insertion of an InGaAs strained interlayer combined with thermal cycle annealing instead of strained layer superlattices. All the layers were grown by low-pressure metalorganic vapor ph...
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Veröffentlicht in: | Applied physics letters 1998-11, Vol.73 (20), p.2917-2919 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | High-quality GaAs epilayers with dislocation densities of 1.2×106 cm−2 on (100)Si substrates have been obtained by insertion of an InGaAs strained interlayer combined with thermal cycle annealing instead of strained layer superlattices. All the layers were grown by low-pressure metalorganic vapor phase epitaxy. The threading dislocation density near the surface of 4 μm thick GaAs was measured by plan-view transmission electron microscopy. The threading dislocation density was found to be very sensitive to the In composition of the interlayer and the specifics of thermal cycle annealing. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.122629 |