Multiple-wavelength vertical-cavity laser arrays based on postgrowth lateral-vertical oxidation of AlGaAs

Multiple-wavelength vertical-cavity laser arrays based on postgrowth lateral-vertical oxidation of AlGaAs

We demonstrate that combined lateral-vertical oxidation of AlGaAs can be used to change the resonant wavelength of an optical cavity after the single epitaxial growth. A multiple-wavelength array of vertical-cavity surface-emitting lasers with a 48 nm wavelength span has been realized using this tec...

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Veröffentlicht in:Applied physics letters 1998-07, Vol.73 (3), p.282-284, Article 282
Hauptverfasser: Fiore, A., Akulova, Y. A., Ko, J., Hegblom, E. R., Coldren, L. A.
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Sprache:eng
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Zusammenfassung:We demonstrate that combined lateral-vertical oxidation of AlGaAs can be used to change the resonant wavelength of an optical cavity after the single epitaxial growth. A multiple-wavelength array of vertical-cavity surface-emitting lasers with a 48 nm wavelength span has been realized using this technique.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.121795