Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900 °C leading to nanotubes with len...

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Veröffentlicht in:Applied Physics Letters 1998-06, Vol.72 (26), p.3437-3439
Hauptverfasser: Qin, L. C., Zhou, D., Krauss, A. R., Gruen, D. M.
Format: Artikel
Sprache:eng
Schlagworte:
70 PLASMA PHYSICS AND FUSION
CARBON
CATALYSIS
CHEMICAL VAPOR DEPOSITION
HYDROGEN
MATERIALS SCIENCE
METHANE
PLASMA
TUBULES
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Zusammenfassung:A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900 °C leading to nanotubes with lengths of more than 20 μm and diameters on the nanometer scale.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.121658