Measurement of piezoelectrically induced charge in GaN/AlGaN heterostructure field-effect transistors

Electron concentration profiles have been obtained for AlxGa1−xN/GaN heterostructure field-effect transistor structures. Analysis of the measured electron distributions demonstrates the influence of piezoelectric effects in coherently strained layers on III-V nitride heterostructure device characteristics. Characterization of a nominally undoped Al0.15Ga0.85N/GaN transistor structure reveals the presence of a high sheet carrier density in the GaN channel which may be explained as a consequence of piezoelectrically induced charges present at the Al0.15Ga0.85N/GaN interface. Measurements performed on an Al0.15Ga0.85N/GaN transistor structure with a buried Al0.15Ga0.85N isolation layer indicate a reduction in electron sheet concentration in the transistor channel and accumulation of carriers below the Al0.15Ga0.85N isolation layer, both of which are attributable to piezoelectric effects.