Surface resistance imaging with a scanning near-field microwave microscope
We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant fre...
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Veröffentlicht in: | Applied physics letters 1997-09, Vol.71 (12), p.1736-1738 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as two parts in 106 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.120020 |