Surface resistance imaging with a scanning near-field microwave microscope

We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant fre...

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Veröffentlicht in:Applied physics letters 1997-09, Vol.71 (12), p.1736-1738
Hauptverfasser: Steinhauer, D. E., Vlahacos, C. P., Dutta, S. K., Wellstood, F. C., Anlage, Steven M.
Format: Artikel
Sprache:eng
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Zusammenfassung:We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as two parts in 106 for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.120020