PtSi– n –Si Schottky-barrier photodetectors with stable spectral responsivity in the 120–250 nm spectral range

Front-illuminated PtSi–n–Si Schottky barrier photodiodes have been developed for the ultraviolet and vacuum ultraviolet spectral range. Their spectral responsivity was determined in the 120–500 nm spectral range by use of a cryogenic electrical substitution radiometer operated with spectrally dispersed synchrotron radiation. For wavelengths below 250 nm, the spectral responsivity is about 0.03 A/W, comparable to that of GaAsP Schottky photodiodes. Unlike the GaAsP diodes, the new PtSi–n–Si diodes have a spatially uniform response which is virtually stable after prolonged exposure to short wavelength radiation. Even after a radiant exposure of 150 mJ cm−2 at wavelength 120 nm, the relative reduction in spectral responsivity remains below 0.2%. Due to these features, this type of photodiode is a promising candidate for use as secondary detector standard in the ultraviolet and vacuum ultraviolet spectral ranges.