Direct bonding of piezoelectric crystal onto silicon

Direct bonding of piezoelectric crystal onto silicon

A method for bonding a piezoelectric crystal directly onto silicon, without any bonding agents, is reported. The interface microstructure, procedures of fabricating a lithium tantalate (LiTaO3■- on-silicon resonator, and its resonant characteristics are described. This technique is very promising fo...

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Veröffentlicht in:Applied physics letters 1995-11, Vol.67 (22), p.3275-3276
Hauptverfasser: Namba, Akihiko, Sugimoto, Masato, Ogura, Tetsuyoshi, Tomita, Yoshihiro, Eda, Kazuo
Format: Artikel
Sprache:eng
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Zusammenfassung:A method for bonding a piezoelectric crystal directly onto silicon, without any bonding agents, is reported. The interface microstructure, procedures of fabricating a lithium tantalate (LiTaO3■- on-silicon resonator, and its resonant characteristics are described. This technique is very promising for miniaturizing electroacoustic integrated devices.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.114896