MEPHISTO: Performance tests of a novel synchrotron imaging photoelectron spectromicroscope

We discuss the scheme and test performances of this recently commissioned system in its final configuration. The tests show that the improvements in the electron optics system with respect to other instruments in the same class made it possible to reach lateral resolutions in the 50 nm range. They a...

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Veröffentlicht in:Review of scientific instruments 1998-05, Vol.69 (5), p.2062-2066
Hauptverfasser: De Stasio, Gelsomina, Capozi, M., Lorusso, G. F., Baudat, P. A., Droubay, T. C., Perfetti, P., Margaritondo, G., Tonner, B. P.
Format: Artikel
Sprache:eng
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Zusammenfassung:We discuss the scheme and test performances of this recently commissioned system in its final configuration. The tests show that the improvements in the electron optics system with respect to other instruments in the same class made it possible to reach lateral resolutions in the 50 nm range. They also demonstrate rather good spectromicroscopy and spectroscopy performances, reliability and flexibility of operation.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1148899