Direct current conduction properties of sputtered Pt/(Ba0.7Sr0.3)TiO3/Pt thin films capacitors

Current flow through Pt/(Ba0.7Sr0.3)TiO3/Pt stack consists of both polarization current and electronic leakage current, which were separated by monitoring the discharging current when applied voltage was turned off. Electronic current comes from electrical field enhanced Schottky emission at the ele...

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Veröffentlicht in:Applied physics letters 1995-05, Vol.66 (22), p.2975-2977
Hauptverfasser: Hsu, W. Y., Luttmer, J. D., Tsu, R., Summerfelt, S., Bedekar, M., Tokumoto, T., Nulman, J.
Format: Artikel
Sprache:eng
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Zusammenfassung:Current flow through Pt/(Ba0.7Sr0.3)TiO3/Pt stack consists of both polarization current and electronic leakage current, which were separated by monitoring the discharging current when applied voltage was turned off. Electronic current comes from electrical field enhanced Schottky emission at the electrode–dielectric interface, and dominates the current flow at high electric field. At low electric field, polarization current prevails. The voltage and time dependence of the polarization current can be modeled by a distribution of Debye-type relaxations. The relaxation time and capacitance derived from current–time measurements were applied to simulate the current–voltage behavior, where good fitting to experimental result was obtained.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.114248