Reduced effective misfit in laterally limited structures such as epitaxial islands
Numerical finite element calculations have been reported to determine a correction function Φ that describes the reduction of the misfit that occurs when laterally limited structures such as faceted islands or mesa structures are grown on a substrate. The reduction of the average strain energy densi...
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Veröffentlicht in: | Applied physics letters 1995-01, Vol.66 (5), p.574-576 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Numerical finite element calculations have been reported to determine a correction function Φ that describes the reduction of the misfit that occurs when laterally limited structures such as faceted islands or mesa structures are grown on a substrate. The reduction of the average strain energy density is calculated in these three-dimensional islands and compared to the constant strain energy density in a continuous layer. Ratios Φ are obtained from the calculation of different island geometries, i.e., different facet angles γ and different aspect ratios island width l to island height h. These discrete values are fitted by a function which can easily be applied to the full range of aspect ratios (l/h≳0) and facet angles (0° |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.114017 |