Linearization of scan velocity of resonant vibrating‐mirror beam deflectors

Linearization of scan velocity of resonant vibrating‐mirror beam deflectors

The sinelike behavior of the scan velocity of resonant vibrating‐mirror beam deflectors can be linearized by external optics. A good approximation can be achieved by reflection off an elliptical mirror after the deflector. With a moderately large major‐to‐minor‐axes ratio, a substantial linear regio...

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Veröffentlicht in:Rev. Sci. Instrum.; (United States) 1988-11, Vol.59 (11), p.2393-2396
Hauptverfasser: Chen, Shun Le, Yeung, Edward S.
Format: Artikel
Sprache:eng
Schlagworte:
BEAM MONITORS
BEAM OPTICS
BEAM SCANNERS
DESIGN
ELECTROMAGNETIC RADIATION
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
IMAGE SCANNERS
LASER RADIATION
LENSES
MEASURING INSTRUMENTS
MECHANICAL VIBRATIONS
MIRRORS
MONITORS
Optical elements, devices, and systems
Optics
OTHER INSTRUMENTATION
Physics
RADIATIONS 440300 > Miscellaneous Instruments-- (-1989)
Reflectors, beam splitters, and deflectors
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Zusammenfassung:The sinelike behavior of the scan velocity of resonant vibrating‐mirror beam deflectors can be linearized by external optics. A good approximation can be achieved by reflection off an elliptical mirror after the deflector. With a moderately large major‐to‐minor‐axes ratio, a substantial linear region is found over the total scan range in typical deflectors. Numerical simulations are presented to show how linearization can be optimized for a given scan requirement.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1139916