Detection of mercury vapor using resonating microcantilevers

Detection of mercury vapor using resonating microcantilevers

Oscillating silicon nitride microcantilevers coated with a thin gold film have been used to detect mercury vapor in air. Cantilever resonance frequency changes due to surface mass loading as a result of adsorption of mercury vapor. Furthermore, cantilever bending is also altered due to changes in su...

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Veröffentlicht in:Applied Physics Letters 1995-03, Vol.66 (13), p.1695-1697
Hauptverfasser: Thundat, T., Wachter, E. A., Sharp, S. L., Warmack, R. J.
Format: Artikel
Sprache:eng
Schlagworte:
ADSORPTION
AIR POLLUTION MONITORS
BENDING
DETECTION
ENVIRONMENTAL SCIENCES
GOLD
INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS
MECHANICAL VIBRATIONS
MERCURY
SILICON NITRIDES
SURFACE COATING
VAPORS
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Zusammenfassung:Oscillating silicon nitride microcantilevers coated with a thin gold film have been used to detect mercury vapor in air. Cantilever resonance frequency changes due to surface mass loading as a result of adsorption of mercury vapor. Furthermore, cantilever bending is also altered due to changes in surface stress induced by mercury adsorption on the gold overlayer. Both of these phenomena can be used to quantitatively detect adsorbed vapors with picogram mass resolution.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.113896