Polarization modulation ellipsometry: A compact and easy handling instrument

A polarization modulation ellipsometer for measurements of the complex dielectric function of opaque and reflecting materials in the wavelength range 230–920 nm is presented. The instrument can be built at relatively moderate cost but offers reasonable accuracy. It is suitable for routine measuremen...

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Veröffentlicht in:	Review of scientific instruments 1985-12, Vol.56 (12), p.2222-2227
Hauptverfasser:	Huber, E., Baltzer, N., von Allmen, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Optical instruments, equipment and techniques Physics Polarimeters and ellipsometers
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A polarization modulation ellipsometer for measurements of the complex dielectric function of opaque and reflecting materials in the wavelength range 230–920 nm is presented. The instrument can be built at relatively moderate cost but offers reasonable accuracy. It is suitable for routine measurements in a general solid‐state laboratory because of its easy handling and maintenance.
ISSN:	0034-6748 1089-7623
DOI:	10.1063/1.1138403