Imaging and profiling surface microstructures with noninterferometric confocal laser feedback

Imaging and profiling surface microstructures with noninterferometric confocal laser feedback

Exploiting the sensitivity and the self-aligning features of the confocal laser-feedback technique and the convenience of superluminescent laser diodes, we developed an optical method for imaging and profiling surface microstructures with a depth resolution as great as 20 nm. The incoherent, noninte...

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Veröffentlicht in:Applied physics letters 1995-04, Vol.66 (16), p.2022-2024
Hauptverfasser: Lu, Chun-Hung, Wang, Jyhpyng, Deng, King-Li
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container_issue 16
container_start_page 2022
container_title Applied physics letters
container_volume 66
creator Lu, Chun-Hung
Wang, Jyhpyng
Deng, King-Li
description Exploiting the sensitivity and the self-aligning features of the confocal laser-feedback technique and the convenience of superluminescent laser diodes, we developed an optical method for imaging and profiling surface microstructures with a depth resolution as great as 20 nm. The incoherent, noninterferometric nature of the technique enables fast open-loop operation and large dynamic range. Measurements of calibrated semiconductor surface microstructures and optical ridge waveguides are demonstrated.
doi_str_mv 10.1063/1.113679
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title Imaging and profiling surface microstructures with noninterferometric confocal laser feedback
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