Imaging and profiling surface microstructures with noninterferometric confocal laser feedback
Exploiting the sensitivity and the self-aligning features of the confocal laser-feedback technique and the convenience of superluminescent laser diodes, we developed an optical method for imaging and profiling surface microstructures with a depth resolution as great as 20 nm. The incoherent, noninte...
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Veröffentlicht in: | Applied physics letters 1995-04, Vol.66 (16), p.2022-2024 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Exploiting the sensitivity and the self-aligning features of the confocal laser-feedback technique and the convenience of superluminescent laser diodes, we developed an optical method for imaging and profiling surface microstructures with a depth resolution as great as 20 nm. The incoherent, noninterferometric nature of the technique enables fast open-loop operation and large dynamic range. Measurements of calibrated semiconductor surface microstructures and optical ridge waveguides are demonstrated. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.113679 |