UHV application of spring‐loaded Teflon seals
Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10−11 Torr are described. They employ doubly differentially pumped commercially available spring‐loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other th...
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Veröffentlicht in: | Review of scientific instruments 1978-11, Vol.49 (11), p.1518-1519 |
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container_title | Review of scientific instruments |
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creator | Auerbach, Daniel J. Becker, Charles A. Cowin, James P. Wharton, Lennard |
description | Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10−11 Torr are described. They employ doubly differentially pumped commercially available spring‐loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other than atmospheric force. |
doi_str_mv | 10.1063/1.1135303 |
format | Article |
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issn | 0034-6748 1089-7623 |
language | eng |
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title | UHV application of spring‐loaded Teflon seals |
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