UHV application of spring‐loaded Teflon seals

UHV application of spring‐loaded Teflon seals

Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10−11 Torr are described. They employ doubly differentially pumped commercially available spring‐loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other th...

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Veröffentlicht in:Review of scientific instruments 1978-11, Vol.49 (11), p.1518-1519
Hauptverfasser: Auerbach, Daniel J., Becker, Charles A., Cowin, James P., Wharton, Lennard
Format: Artikel
Sprache:eng
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Zusammenfassung:Large, bakeable, rotatable ultrahigh vacuum seals capable of operation at 10−11 Torr are described. They employ doubly differentially pumped commercially available spring‐loaded Teflon seals. A static version is very convenient for quick access as it requires nearly negligible sealing force other than atmospheric force.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1135303