Growth of KNbO3 thin films on MgO by pulsed laser deposition
Crystalline and stoichiometric KNbO3 thin films have been grown on (100) oriented MgO substrates by pulsed laser deposition technique. Electron microprobe analysis and Rutherford backscattering spectroscopy of the films show a progressive loss of K with increasing substrate-target distance. To compe...
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Veröffentlicht in: | Applied physics letters 1994-07, Vol.65 (4), p.502-504 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Crystalline and stoichiometric KNbO3 thin films have been grown on (100) oriented MgO substrates by pulsed laser deposition technique. Electron microprobe analysis and Rutherford backscattering spectroscopy of the films show a progressive loss of K with increasing substrate-target distance. To compensate for this K loss the ceramic KNbO3 targets were enriched with K2CO3 powder, pressed at room temperature, and sintered at 650 °C. For a substrate-target distance of 6 cm, targets with [K]/[Nb] molar ratio=2.85 yield stoichiometric KNbO3 films. A partial oxygen pressure of 2×10−2 mbar was optimum for growing transparent films. Films grown between 650 and 700 °C show the KNbO3 crystalline phase with its (110) axis preferentially oriented perpendicular to the surface of the substrate. At these temperatures KNbO3 diffusion into the MgO substrate is observed. Films grown from KNbO3 single crystal targets only contain a Mg4Nb2O9 crystalline layer. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.112280 |