Antiresonant reflecting optical waveguides in strip configuration
A monomode antiresonant reflecting optical strip waveguide has been realized in SiON. The lateral confinement is provided by strip-loaded reflectors fabricated by reactive ion beam etching.
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| Veröffentlicht in: | Applied physics letters 1994-01, Vol.64 (3), p.276-278, Article 276 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A monomode antiresonant reflecting optical strip waveguide has been realized in SiON. The lateral confinement is provided by strip-loaded reflectors fabricated by reactive ion beam etching. |
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| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.111179 |