Relationship among reflectance-difference spectroscopy, surface photoabsorption, and spectroellipsometry

From the reflectance expressions for a thin biaxial layer on an isotropic substrate we relate reflectance-difference spectroscopy (RDS), surface photoabsorption (SPA), and spectroellipsometry. Using these results and our recently acquired RD database, we determine surface reconstructions present dur...

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Veröffentlicht in:Applied physics letters 1993-08, Vol.63 (7), p.885-887
Hauptverfasser: HINGERL, K, ASPNES, D. E, KAMIYA, I, FLOREZ, L. T
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Sprache:eng
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Zusammenfassung:From the reflectance expressions for a thin biaxial layer on an isotropic substrate we relate reflectance-difference spectroscopy (RDS), surface photoabsorption (SPA), and spectroellipsometry. Using these results and our recently acquired RD database, we determine surface reconstructions present during flow-modulated organometallic chemical vapor growth of epitaxial GaAs from SPA data that were published by others.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.109890