Optical intensity modulation in a vertically stacked coupler incorporating electro-optic polymer

A vertically stacked directional coupler incorporating electro-optic poled polymer was fabricated by spin coating, photolithography, and reactive ion etching processes, based on the fabrication technique used for polymeric single-mode channel waveguides. Vertically coupled operation at 1.3 μm have b...

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Veröffentlicht in:Applied physics letters 1993-08, Vol.63 (9), p.1161-1163
Hauptverfasser: HIKITA, M, SHUTO, Y, AMANO, M, YOSHIMURA, R, TOMARU, S, KOZAWAGUCHI, H
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Sprache:eng
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Zusammenfassung:A vertically stacked directional coupler incorporating electro-optic poled polymer was fabricated by spin coating, photolithography, and reactive ion etching processes, based on the fabrication technique used for polymeric single-mode channel waveguides. Vertically coupled operation at 1.3 μm have been achieved between two stacked channels which were kept 3.5–5 μm apart by a narrow cladding layer. The intensity modulation has been clearly demonstrated in the coupler with electrodes when a voltage is applied at 10 kHz between them.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.109809