Surface-enhanced Raman scattering of amorphous silicon-carbon films

Surface-enhanced Raman scattering has been used to study the surface of magnetron sputtered amorphous silicon-carbon alloys applying the silver overlayer method. The presence of clusters from the sputtered material and different types of carbon–carbon bond configurations has been detected on the film surface. It has been shown that structural transformations which are not related to the hydrogen in the plasma take place on the surface.