MgO epitaxial thin films on (100) GaAs as a substrate for the growth of oriented PbTiO3

Epitaxial MgO thin films were grown on (100) GaAs substrates by reactive rf magnetron sputtering. Coupled x-ray diffraction, off-axis φ scan, and transmission electron microscopy indicated in-plane alignment of the MgO film with the GaAs substrate such that MgO[100]∥GaAs[100]. PbTiO3 ferroelectric t...

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Veröffentlicht in:Applied physics letters 1992-06, Vol.60 (25), p.3105-3107
Hauptverfasser: Hsu, Wei-Yung, Raj, Rishi
Format: Artikel
Sprache:eng
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Zusammenfassung:Epitaxial MgO thin films were grown on (100) GaAs substrates by reactive rf magnetron sputtering. Coupled x-ray diffraction, off-axis φ scan, and transmission electron microscopy indicated in-plane alignment of the MgO film with the GaAs substrate such that MgO[100]∥GaAs[100]. PbTiO3 ferroelectric thin films, grown on this MgO surface, were found to be oriented with PbTiO3{100}∥ MgO(001)∥ GaAs(001) and PbTiO3〈100〉∥ MgO[100]∥ GaAs[100].
ISSN:0003-6951
1077-3118
DOI:10.1063/1.106766