Tuning of the Schottky barrier height using bi-metallic layered structures

Bi-metallic Schottky contacts of Cr-Al on p-type Si using a layered structure have been investigated. In these contacts, the thickness of the inner layer in contact with Si was varied, while that of the outer metal layer was kept constant. Our studies indicate that the barrier height changes with th...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Applied physics letters 1991-11, Vol.59 (20), p.2541-2542
Hauptverfasser: CHANDRIKA NARAYAN, KARAKASHIAN, A. S, KEGEL, G. H. R, RIVERA, Z
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Bi-metallic Schottky contacts of Cr-Al on p-type Si using a layered structure have been investigated. In these contacts, the thickness of the inner layer in contact with Si was varied, while that of the outer metal layer was kept constant. Our studies indicate that the barrier height changes with the thickness of the inner metal layer. Furthermore, the morphology of our samples was examined with a transmission electron microscope (TEM) which indicates the presence of inhomogeneous mixing of Cr and Al.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.105946