Tuning of the Schottky barrier height using bi-metallic layered structures
Bi-metallic Schottky contacts of Cr-Al on p-type Si using a layered structure have been investigated. In these contacts, the thickness of the inner layer in contact with Si was varied, while that of the outer metal layer was kept constant. Our studies indicate that the barrier height changes with th...
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Veröffentlicht in: | Applied physics letters 1991-11, Vol.59 (20), p.2541-2542 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Bi-metallic Schottky contacts of Cr-Al on p-type Si using a layered structure have been investigated. In these contacts, the thickness of the inner layer in contact with Si was varied, while that of the outer metal layer was kept constant. Our studies indicate that the barrier height changes with the thickness of the inner metal layer. Furthermore, the morphology of our samples was examined with a transmission electron microscope (TEM) which indicates the presence of inhomogeneous mixing of Cr and Al. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.105946 |