Effects of beam parameters on excimer laser deposition of YBa2Cu3O7-δ

Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O7−δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis...

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Veröffentlicht in:	Applied physics letters 1990-02, Vol.56 (6), p.578-580
Hauptverfasser:	MUENCHAUSEN, R. E, HUBBARD, K. M, FOLTYN, S, ESTLER, R. C, NOGAR, N. S, JENKINS, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physics Solid surfaces and solid-solid interfaces Surface and interface dynamics and vibrations Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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Zusammenfassung:	Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O7−δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos3.5(θ) spread and composition varied with angle; in the perpendicular direction, more diffuse [cos1.5(θ)] plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.103303