Strain mapping in[111] and [001] InGaAs/GaAs superlattices

Raman area maps measuring the strain in lattice-mismatched [111] and [001] oriented InxGa1−xAs/GaAs superlattices (x=0.1, 0.17) are presented and compared with independent x-ray rocking curve studies of the average strain in the same samples. We find that the LO phonon frequency, but not the TO freq...

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Veröffentlicht in:Applied physics letters 1990-01, Vol.56 (3), p.286-287
Hauptverfasser: VENKATESWARAN, U. D, CUI, L. J, LI, M, WEINSTEIN, B. A, ELCESS, K, FONSTAD, C. G, MAILHIOT, C
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Sprache:eng
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Zusammenfassung:Raman area maps measuring the strain in lattice-mismatched [111] and [001] oriented InxGa1−xAs/GaAs superlattices (x=0.1, 0.17) are presented and compared with independent x-ray rocking curve studies of the average strain in the same samples. We find that the LO phonon frequency, but not the TO frequency, is a valid measure of strain for [111] oriented superlattices exhibiting one-mode behavior. This is explained by the lack of compensation between the effects of alloying and strain for the TO mode in InxGa1−xAs. The capability to nondestructively map small growth variations in superlattice and buffer layer constituents is demonstrated.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.102810