X-ray diffraction from corrugated crystalline surfaces and interfaces

Satellite peaks analogous to superlattice peaks have been observed for both corrugated InP substrates and for such substrates overgrown with epitaxial InGaAsP. These satellites are entirely due to the corrugations. High-resolution x-ray diffraction using extremely asymmetric reflections in the glancing exit configuration was used. A kinematical expression for the intensities of the satellite peaks is derived for strain-free structures.