Gallium phosphide microlenses by mass transport

Gallium phosphide microlenses by mass transport

Arrays of high quality refractive microlenses have been formed in GaP substrates by mesa etching followed by a heat treatment in which the multistep mesas were smoothed due to surface energy minimization. A smooth lens surface and an accurately controlled lens profile have been obtained. Microlenses...

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Veröffentlicht in:Applied physics letters 1989-07, Vol.55 (2), p.97-99
Hauptverfasser: IAU, Z. L, DIADIUK, V, WALPOLE, J. N, MULL, D. E
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Lenses, prisms, and mirrors
Optical elements, devices, and systems
Optics
Physics
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Beschreibung
Zusammenfassung:Arrays of high quality refractive microlenses have been formed in GaP substrates by mesa etching followed by a heat treatment in which the multistep mesas were smoothed due to surface energy minimization. A smooth lens surface and an accurately controlled lens profile have been obtained. Microlenses of 130 μm diameter and 200 μm focal length have been used to collimate the outputs of GaInAsP/InP and GaAs/GaAlAs diode lasers and have yielded a nearly diffraction-limited beam divergence of 0.68°.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.102099