Nonlinear viscoelastic dilation of SiO2 films

Oxide dilation in thin films is analyzed using a Voigt viscoelastic model. If stress-dependent viscosity is used to model the dilation, a logarithmic time evolution is predicted. The form of the solution is in agreement with the non-Maxwellian behavior seen in experimental data. The analysis provide...

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Veröffentlicht in:Applied physics letters 1989-01, Vol.54 (2), p.151-152
Hauptverfasser: RAFFERTY, C. S, LANDSBERGER, L. M, DUTTON, R. W, TILLER, W. A
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container_issue 2
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container_title Applied physics letters
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creator RAFFERTY, C. S
LANDSBERGER, L. M
DUTTON, R. W
TILLER, W. A
description Oxide dilation in thin films is analyzed using a Voigt viscoelastic model. If stress-dependent viscosity is used to model the dilation, a logarithmic time evolution is predicted. The form of the solution is in agreement with the non-Maxwellian behavior seen in experimental data. The analysis provides an estimate of the critical stress and low-stress viscosity of dry SiO2 films.
doi_str_mv 10.1063/1.101440
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ispartof Applied physics letters, 1989-01, Vol.54 (2), p.151-152
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1077-3118
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subjects Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title Nonlinear viscoelastic dilation of SiO2 films
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