Theory of polymer ablation

Theory of polymer ablation

A new formula is presented for the etch depth l per pulse of an excimer laser of fluence F. Incremental ablation is defined as the etch depth per pulse after many pulses. We show that l is proportional to F, rather than ln(F).

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Veröffentlicht in:Appl. Phys. Lett.; (United States) 1988-12, Vol.53 (24), p.2377-2379
Hauptverfasser: MAHAN, G. D, COLE, H. S, LIU, Y. S, PHILIPP, H. R
Format: Artikel
Sprache:eng
Schlagworte:
ABLATION
Applied sciences
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
ELECTROMAGNETIC RADIATION
ETCHING
Exact sciences and technology
LASER RADIATION
Physical properties
Polymer industry, paints, wood
POLYMERS
Properties and testing
Radiation influence
RADIATIONS
SURFACE FINISHING 656003 > Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
Technology of polymers
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Beschreibung
Zusammenfassung:A new formula is presented for the etch depth l per pulse of an excimer laser of fluence F. Incremental ablation is defined as the etch depth per pulse after many pulses. We show that l is proportional to F, rather than ln(F).
ISSN:0003-6951
1077-3118
DOI:10.1063/1.100235