Thermal atomic layer deposition of Er 2 O 3 films from a volatile, thermally stable enaminolate precursor
Thin films of Er O films were grown by atomic layer deposition using the Er precursor tris(1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate)erbium(III) (Er(L ) ), with water as the co-reactant. Saturative, self-limited growth was observed at a substrate temperature of 200 °C for pulse lengths of ≥4.0...
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Veröffentlicht in: | Dalton transactions : an international journal of inorganic chemistry 2023-08, Vol.52 (32), p.11096-11103 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Thin films of Er
O
films were grown by atomic layer deposition using the Er precursor tris(1-(dimethylamino)-3,3-dimethylbut-1-en-2-olate)erbium(III) (Er(L
)
), with water as the co-reactant. Saturative, self-limited growth was observed at a substrate temperature of 200 °C for pulse lengths of ≥4.0 s for Er(L
)
and ≥0.2 s for water. An ALD window was observed from 175 to 225 °C with a growth rate of about 0.25 Å per cycle. Er
O
films grown at 200 °C on Si(100) and SiO
substrates with a thickness of 33 nm had root mean square surface roughnesses of 1.75 and 0.75 nm, respectively. Grazing incidence X-ray diffraction patterns showed that the films were composed of polycrystalline Er
O
at all deposition temperatures on Si(100) and SiO
substrates. X-ray photoelectron spectroscopy revealed stoichiometric Er
O
, with carbon and nitrogen levels below the detection limits after argon ion sputtering to remove surface impurities. Transmission electron microscopy studies of Er
O
film growth in nanoscale trenches (aspect ratio = 10) demonstrated conformal coverage. |
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ISSN: | 1477-9226 1477-9234 |
DOI: | 10.1039/D3DT01824E |