Accurate electronics calibration for particle backscattering spectrometry

Rutherford backscattering spectrometry (RBS) is a non-destructive thin film analytical technique of the highest absolute accuracy which, when used for elemental depth profiling, depends at first order on the gain of the pulse-height spectrometry system. We show here for the first time how this gain can be reliably and robustly determined at about 0.1%. Rutherford backscattering spectrometry (RBS) is a non-destructive thin film analytical technique of the highest absolute accuracy which, when used for elemental depth profiling, depends at first order on the gain of the pulse-height spectrometry system.