Scanning Probe Lithography. 2. Selective Chemical Vapor Deposition of Copper into Scanning Tunneling Microscope-Defined Patterns

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Veröffentlicht in:	Langmuir 1994-03, Vol.10 (3), p.615-618
Hauptverfasser:	Schoer, Jonathan K, Ross, Claudia B, Crooks, Richard M, Corbitt, Thomas S, Hampden-Smith, Mark J
Format:	Artikel
Sprache:	eng
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creator	Schoer, Jonathan K Ross, Claudia B Crooks, Richard M Corbitt, Thomas S Hampden-Smith, Mark J
description
doi_str_mv	10.1021/la00015a002
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title	Scanning Probe Lithography. 2. Selective Chemical Vapor Deposition of Copper into Scanning Tunneling Microscope-Defined Patterns
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