Control of Surface Film Composition and Orientation with Downstream PECVD of Hexafluoropropylene Oxide

Control of Surface Film Composition and Orientation with Downstream PECVD of Hexafluoropropylene Oxide

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Veröffentlicht in:Chemistry of materials 1999-04, Vol.11 (4), p.862-864
Hauptverfasser: Butoi, Carmen I, Mackie, Neil M, Barnd, Jeffrey L, Fisher, Ellen R, Gamble, Lara J, Castner, David G
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Sprache:eng
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Applied sciences
Exact sciences and technology
Physicochemistry of polymers
Polymerization
Polymers and radiations
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container_end_page 864
container_issue 4
container_start_page 862
container_title Chemistry of materials
container_volume 11
creator Butoi, Carmen I
Mackie, Neil M
Barnd, Jeffrey L
Fisher, Ellen R
Gamble, Lara J
Castner, David G
description
doi_str_mv 10.1021/cm981081p
format Article
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subjects Applied sciences
Exact sciences and technology
Physicochemistry of polymers
Polymerization
Polymers and radiations
title Control of Surface Film Composition and Orientation with Downstream PECVD of Hexafluoropropylene Oxide
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