Laser-Driven One- and Two-Dimensional Subwavelength Periodic Patterning of Thin Films Made of a Metal-Organic MoS 2 Precursor

Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we...

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Veröffentlicht in:ACS nano 2022-07, Vol.16 (7), p.10412-10421
Hauptverfasser: Durbach, Sebastien, Krauss, Falk T, Hoffmann, Marius, Lehmann, Viktor, Reinhardt, Hendrik, Sundermeyer, Jörg, Hampp, Norbert
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Sprache:eng
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Zusammenfassung:Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we introduce subwavelength surface patterning of metal-organic thin films of [Mo S (S CN Bu ) ], a MoS precursor. Accurate control of one- and two-dimensional (1D and 2D) periodic patterns is achieved on silicon wafers with a pulsed 532 nm ns laser. With suitable combinations of laser polarization, laser pulse energy, the thickness of the SiO passivation layer, and the MoS precursor's thin film thickness, high-quality 1D and 2D self-organized periodic structures are obtained in virtually unlimited areas. The material redistribution related to the pattern formation is thermally driven at low laser energies. Increasing pulse energies beyond a threshold level, in our experiments a factor of 2, fully converts the precursor to MoS .
ISSN:1936-0851
1936-086X
DOI:10.1021/acsnano.2c00671