Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy

Sequential infiltration synthesis (SIS), when combined with novel polymeric materials capable of self-assembly, such as block copolymers (BCPs), has been shown to effectively improve the pattern transfer of nanoscale templates. Herein, we present a study of the SIS process aimed at elucidating some...

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Veröffentlicht in:	Journal of physical chemistry. C 2017-02, Vol.121 (5), p.3078-3086
Hauptverfasser:	Lorenzoni, Matteo, Evangelio, Laura, Fernández-Regúlez, Marta, Nicolet, Célia, Navarro, Christophe, Pérez-Murano, Francesc
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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