Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy

Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy

Sequential infiltration synthesis (SIS), when combined with novel polymeric materials capable of self-assembly, such as block copolymers (BCPs), has been shown to effectively improve the pattern transfer of nanoscale templates. Herein, we present a study of the SIS process aimed at elucidating some...

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Veröffentlicht in:Journal of physical chemistry. C 2017-02, Vol.121 (5), p.3078-3086
Hauptverfasser: Lorenzoni, Matteo, Evangelio, Laura, Fernández-Regúlez, Marta, Nicolet, Célia, Navarro, Christophe, Pérez-Murano, Francesc
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container_end_page 3086
container_issue 5
container_start_page 3078
container_title Journal of physical chemistry. C
container_volume 121
creator Lorenzoni, Matteo
Evangelio, Laura
Fernández-Regúlez, Marta
Nicolet, Célia
Navarro, Christophe
Pérez-Murano, Francesc
description Sequential infiltration synthesis (SIS), when combined with novel polymeric materials capable of self-assembly, such as block copolymers (BCPs), has been shown to effectively improve the pattern transfer of nanoscale templates. Herein, we present a study of the SIS process aimed at elucidating some critical aspects such as the evolution of the BCP morphology and mechanical properties after infiltration. Atomic force microscopy nanomechanical mapping was able to measure a consistent stiffness change within the SIS-infiltrated poly­(methyl methacrylate) (PMMA) blocks. Interestingly, the increase in Young’s modulus of the infiltrated blocks is small compared to the final stiffening of the same infiltrated features after a treatment with oxygen plasma.
doi_str_mv 10.1021/acs.jpcc.6b11233
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title Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy
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