Determination of the degree of ionization of vapors of conducting and dielectric materials during electron-beam evaporation in the forevacuum range of pressure

We describe a method that uses a condensation probe for measuring the degree of ionization of the vapor of electron-beam evaporated materials in the forevacuum pressure range. The probe design and its working principles are described. The degree of ionization of solid targets evaporated by an electron beam is shown to exceed 65%. •Magnetic condensation probe has been introduced to analyze complex beam plasma.•Degree of ionization of electron-beam-evaporated targets vapors has been measured.•Beam plasma formed from Pb, Zn, Cu and Al2O3 targets has more than 65% of ions.