Preparation of transparent and hydrophobic cerium oxide films with stable mechanical properties by magnetron sputtering

Transparent and hydrophobic cerium oxide films with stable mechanical properties are deposited onto glass substrates by magnetron sputtering technique. It is found that water contact angle is correlated with surface roughness and surface chemistry. Under the synergistic effect of the two factors, water contact angle reaches 109.4° when deposited with 14% oxygen concentration. Meanwhile, the film shows a high optical transmittance of ~84.0% at 550 nm wavelength. On the other hand, the stable mechanical property could protect the film surface from solid particle bombardment, tape peeling and mechanical abrasion. The results make the practical applications of transparent hydrophobic film with stable mechanical properties in our daily life more feasible. •Cerium oxide films are deposited by reactive magnetron sputtering.•Oxygen flow ratio allows to vary structure and properties of deposited films.•Cerium oxide films are hydrophobic with water contact angle exceeds 100°.•The films are optically transparent with ~84.0% transmittance at 550 nm.•Prepared films exhibit stable mechanical properties.