Continuous distribution of interface states in n-type double-side poly-Si/SiOx passivating contact solar cells

Advanced passivation contact in high-efficiency silicon solar cells plays an important role for the sake of minimizing recombination losses. A stack of heavily doped polycrystalline silicon (poly-Si) and tunnel SiOx contact has attracted much attention, benefitting from its excellent characteristics of carrier selectivity and passivation, and which has been successfully applied in double-side poly-Si/SiOx passivating contact solar cells. Note that characteristics analysis of defects at tunnel SiOx/c-Si (crystalline silicon) interface remains an issue of concern. Herein, we observe capacitance transient spectroscopy arise from both electron and hole traps in the passivating contact structure of poly-Si(p+)/tunnel SiOx/c-Si(n). Subsequently, we propose a skillful procedure of deep-level transient spectroscopy (DLTS) measurement to confirm that the observed electron and hole traps are located at the tunnel SiOx/c-Si interface but not in the bulk of the c-Si substrate. Finally, we show a clear physical picture of continuous energy distribution for interface states. •Detailed electrical properties of interface states at tunnel SiOx/c-Si are analyzed by DLTS technology.•The interface states at tunnel SiOx/c-Si contain both electron and hole traps.•The overall distribution of interface state density Dit is analogous ‘U-shaped’.