An electromagnetic indirect-driving scanning mirror for wide-field coaxial LiDAR applications

This paper reports an electromagnetic indirect-driving scanning mirror with an enlarged mirror plate (17mm×17mm) supported by high-strength polymer hinges for wide-field coaxial LiDAR (Light Detection and Ranging) applications. An indirect-driving mechanism was developed to achieve large tilting angle through mechanical amplification, while maintaining a relatively high resonance frequency of the enlarged mirror plate. A prototype mirror was designed, fabricated, and tested. A Hall scan position sensor was integrated to monitor the pose of the mirror in real time. The testing results show a coupled resonance frequency of 54.9 Hz with an optical tilting angle of ±60°, corresponding to a field of view (FoV) of 120°. A wide-field coaxial LiDAR system was also built based on the indirect-driving scanning mirror, and 2D imaging was demonstrated. [Display omitted] •An indirect-driving mechanism was developed to achieve a large tilting angle and a relatively high resonance frequency.•High magnification of the tilting angle of the mirror plate was achieved through mechanical coupling.•A Hall scan position sensor was integrated to monitor the actual position of the mirror plate in real time.•A coaxial LiDAR imaging system based on the indirect-driving scanning mirror was demonstrated.