Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors

We present, for the first time, a single-layer plate resonator with specific folded anchors capable of reducing the temperature coefficient of frequency (TCF) by two orders of magnitude compared to straight beams. Folded anchors provide differential strain through either compressive or tensile thermal stress depending on the anchor design and, in turn, allow for positive and negative temperature-induced frequency change components. With a nominal 2 MHz frequency, we experimentally report a frequency shift of 2500 ppm over a temperature span from 0ºC to 90ºC using an optimal anchor folding aspect ratio. The frequency-temperature curve exhibits a turnover point at 27ºC granting a unique opportunity to, in a future application, complement this passive strategy with an active micro-oven for negligible TCF. The proposed approach main advantage relies on its mechanical design-level implementation exploiting a geometrical engineering strategy than can be directly extended to other topologies. This technique reveals as particularly suited for ultra-sensitive mass sensing applications based on microelectromechanical systems (MEMS) resonators where single-layer resonators are optimal thanks to their minimum footprint, attaining minimum mass structures. Results demonstrate that adoption of the proposed folded anchors strategy decreases effectively the thermally induced frequency fluctuations within the system intrinsic noise level. [Display omitted] •Geometrical engineering technique of the resonator anchor design to improve frequency stability with temperature.•Experimental results demonstrating the reduction of the TCF by two orders of magnitude are presented for the first time.•Particularly suited for ultra-sensitive mass sensors based on single-layer resonators to attain minimum mass structures.•Fully compatible with further sophisticated active compensation strategies for finer tuning.