A multidimensional integrated micro three-component fluxgate sensor based on microelectromechanical system technology

In this paper, a miniature three-component fluxgate sensor with U-shaped structure is fabricated by the multidimensional integration technology. We manufacture a batch of single axis solenoid fluxgate chips based on Micro Electromechanical System （MEMS） technology, which possesses the Co-based amorphous ribbon core and solenoid excitation-detection coil. According to multidimensional integration theory, a full integrated three-component fluxgate sensors is achieved through orthogonal linking of printed circuit board （PCB） substrates and bonding between single axis fluxgate chip and substrate. The chips used in the X-Y-Z axis have a sensitivity of 1947 V/T, 1951 V/T, and 1949 V/T, and noise power spectral density of 0.061 nT√Hz@1HZ, 0.077 nT√Hz@1HZ, and 0.087 nT√Hz@1HZ, and time-drift peaks of 21 nT, 17.4 nT, and 14.8 nT, respectively. The linear range of three chips is 0–70μT. After least square error correction, the peak-to-peak value of the in-situ total magnetic field decreases from 2.4 μT to 0.22 μT. [Display omitted] •A MEMS multidimensional heterogeneous integration method for three-component fluxgate sensors is proposed.•A U-shaped fully integrated three-component fluxgate sensor is fabricated with a size of only 17.4mm×13.3mm×13.8mm.•Completed the least-squares error correction and verified the sensor's three-component field detection capability.