Shaped input for reducing crosstalk of two-axis MEMS scanners

We have proposed a pre-shaped input method to minimize the crosstalk of two-axis microelectromechanical system (MEMS) scanners. The mechanical and geometrical crosstalk of a two-axis MEMS scanner was estimated to mitigate the total crosstalk of the scan pattern in an image plane. The desired scan pattern was converted into a required mechanical scan angle to compensate for the geometrical crosstalk. The device used in this study was a two-axis gimbal-less MEMS scanner, whose experimental transfer functions were obtained in terms of the mechanical scan angle. The method was evaluated for one-axis driving, reducing the total crosstalk by an average of 23.1 and 2.78 times along the x- and y-axis, respectively. The method was extended to two-axis driving, reducing the total crosstalk by an average of 18.1 and 2.49 times along the x- and y-axis, respectively. The lower reduction in the y-axis can be explained by the fact that the geometrical crosstalk appears much more on the y-axis than x-axis in the present measurement setup. In conclusion, the high suppression of crosstalk experimentally indicates that this method can effectively mitigate the total crosstalk and will be helpful to improve the performance of MEMS scanners. [Display omitted] •Pre-shaped input was applied to obtain desirable output for two-axis MEMS scanners.•Two-axis pre-shaped input was carried out to reduce the crosstalk in MEMS scanner.•Scan pattern was improved by removing optical and mechanical crosstalk.