Phase-tilting and rotation interferometry for dynamic optical measurement

•Initial vibration parameters are calculated by the iterative closest point method.•Identification of phase-tilting and rotation parameters using different strategies.•The basis of optimizing the rotation angle relies on morphological characteristics.•Calculation accuracy can be improved by enlarging morphological characteristics.•Accurate phase distribution can be measured in the case of the air flotation tray. In this study, a phase-tilt-rotation iteration algorithm is proposed to realize the phase interferometry measurement of a wafer supported by an air flotation tray with random phase tilt-shifting and rotation vibration. The phase distribution and tilt-shifting values are retrieved by the four-step iteration method, while the rotation values are extracted by the amplified phase distribution and low-frequency morphological characteristics acquired by the spatial carrier interferometry method, with the iterative closest point algorithm. Accuracy phase distribution can be achieved by alternately optimizing the above two processes. The simulation and experiment are carried out to demonstrate the high performance of the proposed method. The results show that it works well with the vibration of random tilt-shifting and rotation on traditional interferometers without additional optical structures.