Rapid misalignment correction method in reflective fourier ptychographic microscopy for full field of view reconstruction

lA fast misalignment correction algorithm for reflective fourier ptychographic microscopy (FPM) is reported.lMisalignment errors in a bright-field illuminator is obtained with a direct capture method without using algorithms.lA segment-independent misalignment correction FPM (mcFPM) method is presented.lThe segment-independent mcFPM enables fast reconstruction of a full field of view (FOV) image. Fourier ptychographic microscopy (FPM) is a promising phase retrieval algorithm that does not need interferometry. Recently, reflective FPM has been highlighted as a measuring method for surface inspection in the industry, but using it is challenging because of the limited speed of the conventional misalignment correction methods. Here, we propose a new misalignment correction method to overcome this limitation by using additional 4f imaging and modifying the conventional misalignment method. As a result, about 1 mm2 (8095 × 8095) wide field of view image was reconstructed within 980.3 s.