In situ measurement and error compensation of monolithic multisurface optics

In recent years, monolithic multisurface optics with high-order aspheric surfaces and free-form surfaces have become a research hotspot. However, the high-precision shape and position error detection and high-efficiency compensation processing are the challenges faced by monolithic multisurface optics. In this paper, the shape and position error detection and compensation processing methods of monolithic multisurface optics are researched. Firstly, the highly accurate measurement of tool radius and highly accurate centering are realized by in situ interferometry. Moreover, the shape and position detection CGH is designed. Finally, the high-precision in situ detection and compensation turning experiments of monolithic multisurface optics are carried out, and the high-precision and high-efficiency processing are realized. •Highly accurate measurement of tool radius with in situ interferometry.•Highly accurate alignment by in situ interferometry.•High-precision in situ detection and compensation turning of the monolithic multisurface optics.•Separation of clamping error.