The retrieval of a thin silver film dielectric constant by resonant approach

The film optical parameters retrieval method based on Otto configuration is considered. The high sensitivity of the method in comparison to the ellipsometry is demonstrated. It is shown that the ellipsometric angles of reflection from the Otto configuration can be used for parameters retrieval. The...

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Veröffentlicht in:Optics communications 2020-02, Vol.456, p.124636, Article 124636
Hauptverfasser: Puzko, R.S., Ivanov, A.I., Lotkov, E.S., Rodionov, I.A., Ryzhikov, I.A., Baryshev, A.V., Merzlikin, A.M.
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Sprache:eng
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Zusammenfassung:The film optical parameters retrieval method based on Otto configuration is considered. The high sensitivity of the method in comparison to the ellipsometry is demonstrated. It is shown that the ellipsometric angles of reflection from the Otto configuration can be used for parameters retrieval. The method allows parameters retrieval without additional assumptions on the dielectric constant, being the reliable self consistent retrieval procedure.
ISSN:0030-4018
1873-0310
DOI:10.1016/j.optcom.2019.124636