Low power capacitive-to-digital converter based on incremental delta-sigma modulator

This paper presents a low-power capacitive-to-digital converter (CDC) based on incremental delta-sigma modulator. It utilizes a zoom-in sensing capacitor that is insensitive to parasitic capacitance, improving the capacitance resolution. The use of a high-gain, PVT-robust current-starved OTA and a dynamic bias comparator enhances the efficiency of the system. An ultra-low-power bias circuit is integrated into the system, further improving integration and efficiency. The proposed CDC is fabricated using a 180 nm CMOS process. Operating at a 1.2 V supply voltage and a 250 kHz sampling frequency. With a measurement time of 0.8 ms, the capacitance resolution is 107.6 aF, and the power consumption is 10.27 μW. The figure-of-merits (FoM) is 2.06 pJ/step.